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which is intended to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits
To define the specification and analytical methods and validate the specifications for BCl3
If differences should exist between the redline document and the Current document
This Specification also applies to openings in glass
C05600 - SEMI C56 - Specification for Dichlorosilane (SiH2Cl2) Revision:SEMI C56-0224 - Current which is intended to serveThis Standard provides a series of specifications for different grades of dichlorosilane (SiH2Cl2) that are used in the semiconductor industry. This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3. 18 Specification for Dichlorosilane (SiH2Cl2) in