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M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments 5-0211 (Reapproved 0623)

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Description

5-0211 (Reapproved 0623)

This Guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef

a device must implement and support

This Safety Guideline applies to wafer handling robots and load ports that are being evaluated independently of SME

M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments 5-0211 (Reapproved 0623)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1992; previously published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. Dielectrically isolated (DI) wafers are used for fabricating specialized

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