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Where an analytical procedure different from that provided is substituted by a supplier or user
The scope of this Document is a grade of sodium hydroxide pellets used in the semiconductor industry
Referenced SEMI Standards (purchase separately)
This method can also be used for other applications outside of microelectronics
C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality Revision:SEMI C3.40-1011 - Superseded Where an analytical procedure differentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1989; previously published October 2011. The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry.