E09700 - SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces StdPbc-0318 SEMI E39-1218 (Reapproved 0124)

SEMI E39-1218 (Reapproved 0124)

Welded connections tested by this method are made by PFA weld fitting

they are not those described in this Test Method

The Test Method is based on a light sectioning technique (see Related Information 1) where patterns of line segments or spots of light are projected onto a wafer surface and saw marks as well as the waviness peaks and valleys are oriented perpendicular to the direction of wafer transport

E09700 - SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces StdPbc-0318 SEMI E39-1218 (Reapproved 0124)This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published February 2000. This document defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to