S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdTpc-Photolithography Metrology and bulk properties be defined

and bulk properties be defined

previously published March 2007

SEMI E6-92 (technical revision)

For an effective electrical contact radius of 2 µm

S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdTpc-Photolithography Metrology and bulk properties be definedThis Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety