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C05300 - SEMI C53 - ジメチルスルホキシド(DMSO)[グレード1および2]の仕様 StdTpc-Chemical & Gas General Specifications Ease of Use

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Description

Ease of Use

26-94 (technical revision)

4に続く式3が追加された。

Static leach tests should be used for quality assurance when baseline virgin resin quality has already been established (otherwise use the dynamic leach test to estimate the rinse-up time)

C05300 - SEMI C53 - ジメチルスルホキシド(DMSO)[グレード1および2]の仕様 StdTpc-Chemical & Gas General Specifications Ease of UseNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI DMSO Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals

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