E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port StdPbc-0318 Although this Test Method is

Although this Test Method is generally nonselective

Measurement of the carrier recombination lifetime in the absence of surface recombination results in the determination of the bulk recombination lifetime (tb) provided that the excess carrier density is much less than the majority carrier density

This Document does not include the definition of the treatment of Multiple Stage

SEMI E109-1017 (Reapproved 0623)

E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port StdPbc-0318 Although this Test Method isNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements for the load ports of 300 mm wafer process and inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate