C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded The filter cartridges are separable

The filter cartridges are separable from the housings which can be cleaned and tested independently

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

SEMI C30-0600 (technical revision)

but the results are not intended to imply a performance rating

C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded The filter cartridges are separable1 Purpose 1. 1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e. g., tubing, fittings, and valves). 1. 2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components. 2 Scope 2. 1 This Standard applies to the determination of metal extractable impurity