PV02800 - SEMI PV28 - Test Method for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge Revision:SEMI PV28-0212 - Superseded through transformation to the yield

through transformation to the yield analysis coordinate system

SEMI D19-1019 (technical revision)

SEMI S22-0706a (delayed revision)

본 표준은 특정 데이터 수집 계획을 이용하여 반도체 장비로부터 이벤트(event)

PV02800 - SEMI PV28 - Test Method for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge Revision:SEMI PV28-0212 - Superseded through transformation to the yieldThis Standard was technically approved by the Photovoltaic Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at www. semiviews. org and www. semi. org in March 2016; originally published February 2012. Resistivity is a primary quantity for characterization and specification of material used for photovoltaic (PV) devices. Sheet resistance is a