E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon 5% Quality

5% Quality

This Test Method also describes use of a transfer sensor that is calibrated using a calorimeter and a working sensor that is calibrated using the transfer sensor

This Standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in equipment

this Specification provides state models and scenarios that define the host interaction with the equipment for the following:

E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon 5% Quality1 Purpose 1. 1 The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users. 2 Scope 2. 1 This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry. Referenced SEMI Standards