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This Safety Guideline pertains to FLDs operating at critical flow rates that result from the ratio of the pressure upstream of the FLD to the pressure downstream of the FLD being at least the critical pressure ratio
SEMI E49-0419 (technical revision)
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 21
本スタンダードは，global Silicon Wafer Committeeで技術的に承認されている。現版は2009年1月2日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年2月にwww
M03100 - SEMI M31 - 300 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様 StdPbc-0219 This Safety Guideline pertains toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee200853global Audits and Reviews Subcommittee20086www. semi. org199820073 IC300 mm (front opening shipping Box: FOSB) FOSBFOSB FOSBICFOSBFOUPFOBITICFOSBFOUPFOBIT 5. 4FOSB 5. 4. 1 5. 4. 2
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