Production equipment for microsystems. Interface between end effector and handling system subscription-only ISO 20766‑6 is not applicable

ISO 20766‑6 is not applicable to the following:

What is BS EN 17293 about

Dust                           CADR = 10 cfm

storage and distribution

Production equipment for microsystems. Interface between end effector and handling system subscription-only ISO 20766‑6 is not applicable1 Scope This International Standard specifies provisions for the interface between end effector and handling systems in production equipment for microsystems. It specifies principal deviations, tolerances and designations for manually and automatically changeable end effectors. The aim is to specify the end effector interface in three levels with an increasing degree of specification.