E10700 - SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System StdTpc-Physical Interfaces 本測定は，過剰キャリア密度がウェーハ試料の場合は1 × 1013 cm-3～2 ×

本測定は，過剰キャリア密度がウェーハ試料の場合は1 × 1013 cm-3～2 × 1016 cm-3，バルク試料（厚さ1 cm以上）の場合は1 × 1013 cm-3～5 × 1015 cm-3の範囲内で適用できる。

Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM-compliant equipment to a Machine object

Sample preparation

SEMI M66-0706E (editorial revision)

E10700 - SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System StdTpc-Physical Interfaces 本測定は，過剰キャリア密度がウェーハ試料の場合は1 × 1013 cm-3～2 ×This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 21, 2010. Available at www. semi. org in June 2010; originally published March 2001; previously published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive