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SEMI M50-0923 (technical revision)
SEMI T10-0701 (first published)
This specification was technically approved by the Global Liquid Chemicals Committee
Waviness and other surface features are important characteristics for depositing layers of III-V compound on CSW during HB-LED manufacturing
E08800 - SEMI E88 - AMHS保管SEM（ストッカーSEM）の仕様 Revision:SEMI E88-0307 - Superseded SEMI M50-0923 (technical revision)global Information & Control Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org199920073 : AMHSSEMSEMSEMI E30SEMSEM[SEMI E23] AMHSGEM13SEMI2SECS IISECSSC GEM13SEMGEM Referenced SEMI Standards SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E23 Specification for Cassette Transfer Parallel I O
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